Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm

Abstract

This work deals with various investigations into the accuracy of a newly developed planar nanopositioning machine. This machine, called Nanofabrication Machine 100 (NFM-100), has a positioning range of 100 mm in diameter. To determine the precision, various movement scenarios are performed with the machine table, and the trajectory deviation from the set trajectory is determined. In particular, the focus is on high velocities of up to 20 mm/s. Even at high speeds in the range of several millimetres per second, this machine can impress with its performance and only has a deviation in the nanometre range.

Keywords

• nanopositioning machine
• planar direct drive
• sub-nanometre precision
• macroscopic working range
• high speed