The Study of DLC and Si-DLC Based Coatings and Their Mechanical Properties

Abstract

In this paper, diamond-like carbon (DLC) films and DLC-Si films were studied. These films were deposited by DC-plasma-assisted chemical vapour deposition (PACVD). X-ray diffraction analysis of coatings was used for a determination of coatings structure. In particular, the effect of the crystal structure of the coatings on their mechanical properties was studied.

Keywords

• DLC coatings
• DLC-Si coatings
• X-ray diffraction
• mechanical properties