Micromachines (Feb 2019)

Advances in Capacitive Micromachined Ultrasonic Transducers

  • Kevin Brenner,
  • Arif Sanli Ergun,
  • Kamyar Firouzi,
  • Morten Fischer Rasmussen,
  • Quintin Stedman,
  • Butrus (Pierre) Khuri–Yakub

DOI
https://doi.org/10.3390/mi10020152
Journal volume & issue
Vol. 10, no. 2
p. 152

Abstract

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Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging.

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