Enhanced Crystal Quality of AlxIn1-xAsySb1-y for Terahertz Quantum Cascade Lasers

Abstract

This work provides a detailed study on the growth of AlxIn1-xAsySb1-y lattice-matched to InAs by Molecular Beam Epitaxy. In order to find the conditions which lead to high crystal quality deep within the miscibility gap, AlxIn1-xAsySb1-y with x = 0.462 was grown at different growth temperatures as well as As2 and Sb2 beam equivalent pressures. The crystal quality of the grown layers was examined by high-resolution X-ray diffraction and atomic force microscopy. It was found that the incorporation of Sb into Al0.462In0.538AsySb1-y is strongly temperature-dependent and reduced growth temperatures are necessary in order to achieve significant Sb mole fractions in the grown layers. At 480 ∘ C lattice matching to InAs could not be achieved. At 410 ∘ C lattice matching was possible and high quality films of Al0.462In0.538AsySb1-y were obtained.

Keywords

• MBE
• QCL
• THz
• growth
• AlInAsSb
• antimonides