Study of Cryogenic Unmasked Etching of “Black Silicon” with Ar Gas Additives

• Ekaterina A. Vyacheslavova,
• Ivan A. Morozov,
• Dmitri A. Kudryashov,
• Alexander V. Uvarov,
• Artem I. Baranov,
• Alina A. Maksimova,
• Sergey N. Abolmasov,
• Alexander S. Gudovskikh

Affiliations

Ekaterina A. Vyacheslavova

Alferov University (Saint Petersburg Academic University), Saint Petersburg, Russia

Ivan A. Morozov

Alferov University (Saint Petersburg Academic University), Saint Petersburg, Russia

Dmitri A. Kudryashov

Alferov University (Saint Petersburg Academic University), Saint Petersburg, Russia

Alexander V. Uvarov

Alferov University (Saint Petersburg Academic University), Saint Petersburg, Russia

Artem I. Baranov

Alferov University (Saint Petersburg Academic University), Saint Petersburg, Russia

Alina A. Maksimova

Alferov University (Saint Petersburg Academic University), Saint Petersburg, Russia

Sergey N. Abolmasov

R&D Center of Thin Film Technologies (Hevel LLC), Saint Petersburg, Russia

Alexander S. Gudovskikh

Alferov University (Saint Petersburg Academic University), Saint Petersburg, Russia