Adequate method to study the surface passivation effectiveness in HEM multicristallin silicon wafers

Abstract

In this work we have examined the effectiveness of surface passivation on ascut multicrystalline silicon (mc-Si) wafers using different techniques. The study is based on minority carrier lifetime measurements with quasi steady state photo-conductance, ‘QSSPC’. Effective minority carrier lifetime ()measured values of 12.4, 8.9, 4.9 and 3.1 are obtained respectively with four silicon surface passivation techniques: 1- Shallow phosphorous diffusion emitter (n+p), 2- Iodine-Ethanol (I-E), 3-Hydrofluoric acid (HF) emersion and 4-SiNx layer deposition. These results suggest that the shallow n+p emitter gives the eff close to the bulk lifetime due to the better surface passivation quality. Simulations made with Hornbeck-Haynes model indicate that the improvement can be correlated with the decrease of the surface recombination velocity (SRV) and the increment of bulk lifetime.

Keywords

• lifetime measurement
• multicrystalline silicon
• surface passivation
• minority carrier