We report the first example of room-temperature rubber-like deformation in thin-film metallic glasses (TFMGs), 260-nm-thick Zr60Cu24Al11Ni5 layers, under ultra-high shear strain. The TFMGs were deposited, with no external heating, on Zr-based bulk metallic glass (BMG) and Si(001) substrates by rf magnetron sputtering in a 3 mTorr Ar plasma. Cross-sectional transmission electron microscopy (XTEM) analyses and nanoindentation results reveal that the TFMGs undergo an incredibly large shear strain, estimated to be ∼4000%, during fatigue tests, and thickness reductions of up to 61.5%, with no shear-banding or cracking, during extreme nanoindentation experiments extending through the film and into the substrate. TFMG/BMG samples also exhibit film/substrate diffusion bonding during deformation as shown by high-resolution XTEM.
