Chemical vapor deposition growth and characterization of graphite-like film

Yanhui Zhang; Haibo Shu; Zhiying Chen; Gang Mu; Yanping Sui; Yijian Liang; Shike Hu; Jing Li; He Kang; Guanghui Yu; Songang Peng; Zhi Jin; Xinyu Liu

doi:10.1088/2053-1591/ab664b

Materials Research Express (Jan 2020)

Chemical vapor deposition growth and characterization of graphite-like film

Yanhui Zhang,
Haibo Shu,
Zhiying Chen,
Gang Mu,
Yanping Sui,
Yijian Liang,
Shike Hu,
Jing Li,
He Kang,
Guanghui Yu,
Songang Peng,
Zhi Jin,
Xinyu Liu

Affiliations

Yanhui Zhang: ORCiD; State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, People’s Republic of China
Haibo Shu: College of Optical and Electronic Technology, China Jiliang University , 310018 Hangzhou, People’s Republic of China
Zhiying Chen: State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, People’s Republic of China
Gang Mu: ORCiD; State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, People’s Republic of China
Yanping Sui: State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, People’s Republic of China
Yijian Liang: State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, People’s Republic of China; University of Chinese Academy of Sciences , No.19 A Yuquan Road, Beijing 100049, People’s Republic of China
Shike Hu: State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, People’s Republic of China; University of Chinese Academy of Sciences , No.19 A Yuquan Road, Beijing 100049, People’s Republic of China
Jing Li: State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, People’s Republic of China; University of Chinese Academy of Sciences , No.19 A Yuquan Road, Beijing 100049, People’s Republic of China
He Kang: State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, People’s Republic of China; University of Chinese Academy of Sciences , No.19 A Yuquan Road, Beijing 100049, People’s Republic of China
Guanghui Yu: ORCiD; State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, People’s Republic of China
Songang Peng: Microwave Devices and Integrated Circuits Department, Institute of Microelectronics, Chinese Academy of Sciences, 3 West Beitucheng Road, Beijing 100029, People’s Republic of China
Zhi Jin: Microwave Devices and Integrated Circuits Department, Institute of Microelectronics, Chinese Academy of Sciences, 3 West Beitucheng Road, Beijing 100029, People’s Republic of China
Xinyu Liu: Microwave Devices and Integrated Circuits Department, Institute of Microelectronics, Chinese Academy of Sciences, 3 West Beitucheng Road, Beijing 100029, People’s Republic of China

DOI: https://doi.org/10.1088/2053-1591/ab664b
Journal volume & issue: Vol. 7, no. 1
p. 015609

Abstract

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Thick graphene film can be widely used in surface protection, heat dissipation, heating devices and other fields. Here we present a study on the growth and characterization of large area continuous and patterned graphite-like films prepared on Ni foil through CVD. Effects of parameters on the material growth are studied experimentally and theoretically in detail. Thickness of the graphite-like film in this work can reach 500 nm and can be regulated by growth process. Characterization results show that the graphite-like film is formed by free stacking of large area graphene continuous films and possesses strong mechanical strength, chemical stability, good electrical conductivity and flexibility. The graphite-like film shows potential for application in metal surface protection, flexible conduction, heating and electromagnetic shielding.

Published in Materials Research Express

ISSN: 2053-1591 (Online)
Publisher: IOP Publishing
Country of publisher: United Kingdom
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials; Technology: Chemical technology
Website: https://iopscience.iop.org/journal/2053-1591

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