Magnetostrictive Performance of Electrodeposited TbxDy(1−x)Fey Thin Film with Microcantilever Structures

Hang Shim; Kei Sakamoto; Naoki Inomata; Masaya Toda; Nguyen Van Toan; Takahito Ono

doi:10.3390/mi11050523

Micromachines (May 2020)

Magnetostrictive Performance of Electrodeposited TbxDy(1−x)Fey Thin Film with Microcantilever Structures

Hang Shim,
Kei Sakamoto,
Naoki Inomata,
Masaya Toda,
Nguyen Van Toan,
Takahito Ono

Affiliations

Hang Shim: Department of Mechanical Systems Engineering, Tohoku University, Sendai 980-8579, Japan
Kei Sakamoto: Micro-Nanomachining Research Education Center, Tohoku University, Sendai 980-8579, Japan
Naoki Inomata: Department of Mechanical Systems Engineering, Tohoku University, Sendai 980-8579, Japan
Masaya Toda: Department of Mechanical Systems Engineering, Tohoku University, Sendai 980-8579, Japan
Nguyen Van Toan: Department of Mechanical Systems Engineering, Tohoku University, Sendai 980-8579, Japan
Takahito Ono: Department of Mechanical Systems Engineering, Tohoku University, Sendai 980-8579, Japan

DOI: https://doi.org/10.3390/mi11050523
Journal volume & issue: Vol. 11, no. 5
p. 523

Abstract

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The microfabrication with a magnetostrictive TbxDy(1−x)Fey thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of TbxDy(1−x)Fey is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb0.36Dy0.64Fe1.9 thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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