In recent years, the field of microrobots has exploded, yielding many exciting new functions and applications, from object grasping and release to in vivo drug transport. Smart responsive materials have had a profound impact on the field of microrobots and have given them unique functions and structures. We analyze three aspects of microrobots, in which the future development of microrobots requires more efforts to be invested, and in which smart materials play a significant role in the development of microrobots. These three aspects are smart materials for building microrobots, manufacturing methods, and the functions and applications they achieve. In this review, we discuss the deformation mechanism of materials in response to external stimuli, starting from smart materials, and discuss fabrication methods to realize microrobots, laying the theoretical foundation for future smart material-based microrobots to realize their intelligence and programmability.