Micromachines (Mar 2023)

Mechanical Reliability Assessment of a Flexible Package Fabricated Using Laser-Assisted Bonding

  • Xuan-Luc Le,
  • Xuan-Bach Le,
  • Yuhwan Hwangbo,
  • Jiho Joo,
  • Gwang-Mun Choi,
  • Yong-Sung Eom,
  • Kwang-Seong Choi,
  • Sung-Hoon Choa

DOI
https://doi.org/10.3390/mi14030601
Journal volume & issue
Vol. 14, no. 3
p. 601

Abstract

Read online

The aim of this study was to develop a flexible package technology using laser-assisted bonding (LAB) technology and an anisotropic solder paste (ASP) material ultimately to reduce the bonding temperature and enhance the flexibility and reliability of flexible devices. The heat transfer phenomena during the LAB process, mechanical deformation, and the flexibility of a flexible package were analyzed by experimental and numerical simulation methods. The flexible package was fabricated with a silicon chip and a polyimide (PI) substrate. When the laser beam was irradiated onto the flexible package, the temperatures of the solder increased very rapidly to 220 °C, high enough to melt the ASP solder, within 2.4 s. After the completion of irradiation, the temperature of the flexible package decreased quickly. It was found that the solder powder in ASP was completely melted and formed stable interconnections between the silicon chip and the copper pads, without thermal damage to the PI substrate. After the LAB process, the flexible package showed warpage of 80 μm, which was very small compared to the size of the flexible package. The stress of each component in the flexible package generated during the LAB process was also found to be very low. The flexible device was bent up to 7 mm without failure, and the flexibility can be improved further by reducing the thickness of the silicon chip. The bonding strength and environmental reliability tests also showed the excellent mechanical endurance of the flexible package.

Keywords