Photochemically Engineered Large‐Area Arsenic Sulfide Micro‐Gratings for Hybrid Diffractive–Refractive Infrared Platforms

Abstract

Patterns composed of micron‐sized surface structures can abruptly change the properties of an optical wave front, including its phase, amplitude, polarization, and dispersion. Optical components featuring surface micro‐gratings not only possess optical functionalities that can rival or exceed those of traditional bulky components but can also significantly improve the compactness of optical systems. Herein, the design and fabrication process of As2S3 glass‐based micro‐gratings as well as their resulting optical functionality in the infrared regime are reported. The novel two‐step photochemical process consists of spatially controlled direct laser writing and subsequent selective solution etching. The process yields surface micro‐gratings that possess arbitrarily tunable geometries and design patterns on large‐area flat and curved optical surfaces or substrates, offering a potential new avenue for developing aberration‐corrected infrared‐imaging systems.

Keywords

• arsenic sulfide
• chalcogenide glasses
• diffraction optical elements
• direct laser writing
• micro-gratings
• selective etching