ZnO Nanostructures Prepared by RF Sputtering

Abstract

ZnO is shortly reviewed as significant material for nanotechnology. Sputtered ZnO thin films showed colummarpolycrystalline structure with preffered orientation in <002> direction, resistivity ~ 1 Wcm and optical bandgap Eg = 3,33 eV. Nanoclusters of Au and ZnO were formed by use of RF sputtering.

Keywords

• zno
• nanostructure
• rf sputtering.