Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma

Kunihiro Kamataki; Daiki Nagamatsu; Tao Yang; Kohei Abe; Akihiro Yamamoto; Iori Nagao; Toshiaki Arima; Michihiro Otaka; Yuma Yamamoto; Daisuke Yamashita; Takamasa Okumura; Naoto Yamashita; Naho Itagaki; Kazunori Koga; Masaharu Shiratani

doi:10.1063/5.0097691

AIP Advances (Aug 2022)

Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma

Kunihiro Kamataki,
Daiki Nagamatsu,
Tao Yang,
Kohei Abe,
Akihiro Yamamoto,
Iori Nagao,
Toshiaki Arima,
Michihiro Otaka,
Yuma Yamamoto,
Daisuke Yamashita,
Takamasa Okumura,
Naoto Yamashita,
Naho Itagaki,
Kazunori Koga,
Masaharu Shiratani

Affiliations

Kunihiro Kamataki: Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
Daiki Nagamatsu: Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
Tao Yang: Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
Kohei Abe: Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
Akihiro Yamamoto: Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
Iori Nagao: Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
Toshiaki Arima: Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
Michihiro Otaka: Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
Yuma Yamamoto: Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
Daisuke Yamashita: Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
Takamasa Okumura: Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
Naoto Yamashita: Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
Naho Itagaki: Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
Kazunori Koga: Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
Masaharu Shiratani: Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan

DOI: https://doi.org/10.1063/5.0097691
Journal volume & issue: Vol. 12, no. 8
pp. 085220 – 085220-7

Abstract

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We investigate the effects of the amplitude modulation (AM) discharge method on the growth of nanoparticles and the relation between growth of nanoparticles and plasma generation in tetraethylorthosilicate (TEOS)/O2/Ar plasma. The laser-light scattering (LLS) intensity, which is proportional to the density and the sixth power of the size of nanoparticles in the Rayleigh scattering regime, decreases by 18% at an AM level of 10% and by 60% at an AM level of 50%. On the other hand, the ArI emission intensity, which is roughly proportional to plasma density, is higher than that for the continuous wave discharge. Thus, AM discharges suppress growth of nanoparticles in TEOS plasma. We have shown oscillations of the axial electric field Ez with the AM frequency for AM discharge by electric field measurement using an electro-optic probe. We have discussed that these fluctuations of Ez mainly lead to the vertical oscillation of the levitation position of nanoparticles trapped in the plasma sheath boundary region by taking into account the force balance equation in the axial direction on these negatively charged nanoparticles.

Published in AIP Advances

ISSN: 2158-3226 (Online)
Publisher: AIP Publishing LLC
Country of publisher: United States
LCC subjects: Science: Physics
Website: http://aipadvances.aip.org/

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