Comprehensive dielectric performance of alternately doped BST multilayer films coated with strontium titanate thin layers

Wenlong Liu; Yingjie Lei; Wei Feng; Dengjun He; Yunfeng Zhang; Jing Li; Jiaxuan Liao; Lingzhao Zhang

Journal of Materials Research and Technology (Jul 2021)

Comprehensive dielectric performance of alternately doped BST multilayer films coated with strontium titanate thin layers

Wenlong Liu,
Yingjie Lei,
Wei Feng,
Dengjun He,
Yunfeng Zhang,
Jing Li,
Jiaxuan Liao,
Lingzhao Zhang

Affiliations

Wenlong Liu: School of Food and Biological Engineering, Chengdu University, Chengdu, 610106, China; Yangtze Delta Region Institute (Quzhou), University of Electronic Science and Technology of China, Quzhou, Zhejiang, 324000, China
Yingjie Lei: School of Food and Biological Engineering, Chengdu University, Chengdu, 610106, China
Wei Feng: School of Mechanical Engineering, Chengdu University, Chengdu, 610106, China
Dengjun He: School of Mechanical Engineering, Chengdu University, Chengdu, 610106, China
Yunfeng Zhang: School of Food and Biological Engineering, Chengdu University, Chengdu, 610106, China; Corresponding author.
Jing Li: School of Food and Biological Engineering, Chengdu University, Chengdu, 610106, China
Jiaxuan Liao: Yangtze Delta Region Institute (Quzhou), University of Electronic Science and Technology of China, Quzhou, Zhejiang, 324000, China; School of Materials and Energy, University of Electronic Science and Technology of China, Chengdu, 611731, China; Corresponding author.
Lingzhao Zhang: School of Materials and Energy, University of Electronic Science and Technology of China, Chengdu, 611731, China; Corresponding author.

Journal volume & issue: Vol. 13
pp. 385 – 396

Abstract

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It is a huge difficulty to improve the comprehensive dielectric performance of barium strontium titanate (BST) films for applications in energy storage, microwave, etc. Herein, on Pt/Ti/SiO2/Si substrate strontium titanate (ST), manganese (Mn) doped BST and yttrium (Y) doped BST layers were attempted to be designed as ST/MnBST/YBST/ … /MnBST/YBST/ST films and prepared by a modified sol–gel method, and structures and performances of the films were studied. X-ray diffraction shows that the films are ABO3 perovskite polycrystalline with Ti4+ at B sites replaced by some Mn2+ and exhibit dense nodular microstructures observed by a scanning electron microscope. The films exhibit optimized comprehensive performance with leakage current density of less than 1E-10 A/cm2 at 20 V and dielectric losses of 0.3%–0.4% at 100 kHz and about 1.8% at 1 GHz, meeting the needs of some applications.

Published in Journal of Materials Research and Technology

ISSN: 2238-7854 (Print); 2214-0697 (Online)
Publisher: Elsevier
Country of publisher: Netherlands
LCC subjects: Technology: Mining engineering. Metallurgy
Website: https://www.journals.elsevier.com/journal-of-materials-research-and-technology/

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