Design of RF MEMS Switch with High Stability Effect at the Low Actuation Voltage

Abstract

MEMS switches are one of the most promising future micro-machined products that have attracted numerous research efforts in recent years. This paper presents an innovative design of RF MEMS switch, with low actuation voltage (VT), improved mechanical stability and reduced stiction. The proposed switch is fabricated on a coplanar waveguide (CPW) & actuated by electrostatic force. The mechanical and electrical performance of the switch has been tested. The simulation results show that the actuation voltage can be reduced by using serpentine folded spring, and improved mechanical stability and reduced stiction can be achieved by using a hydrophobic material with high Young’s modulus as insulator in between top and bottom electrode. The measured pull-in voltage is 4 V.

Keywords

• MEMS
• Micro-machined
• Switches
• Actuation voltage
• Stability