One-pot microfluidic fabrication of micro ceramic particles

Abstract

Abstract In the quest for miniaturization across technical disciplines, microscale ceramic blocks emerge as pivotal components, with performance critically dependent on precise scales and intricate shapes. Sharp-edged ceramic microparticles, applied from micromachining to microelectronics, require innovative fabrication techniques for high-throughput production while maintaining structural complexity and mechanical integrity. This study introduces a “one-pot microfluidic fabrication” system incorporating two device fabrication strategies, “groove & tongue” and sliding assembling, achieving an unprecedented array of microparticles with diverse, complex shapes and refined precision, outperforming traditional methods in production rate and quality. Optimally designed sintering profiles based on derivative thermogravimetry enhance microparticles’ shape retention and structural strength. Compression and scratch tests validate the superiority of microparticles, suggesting their practicability for diverse applications, such as precise micromachining, sophisticated microrobotics and delicate microsurgical tools. This advancement marks a shift in microscale manufacturing, offering a scalable solution to meet the demanding specifications of miniaturized technology components.