The WC and CrC Coatings Deposited from Carbonyls Using PE CVD Method—Structure and Properties
Marianna Trebuňová,
Daniel Kottfer,
Karol Kyziol,
Mária Kaňuchová,
Dávid Medveď,
Róbert Džunda,
Marta Kianicová,
Lukáš Rusinko,
Alena Breznická,
Mária Csatáryová
Affiliations
Marianna Trebuňová
Department of Biomedical Engineering and Measurement, Faculty of Mechanical Engineering, Technical University of Košice, Letná 9, 042 00 Košice, Slovakia
Daniel Kottfer
Department of Mechanical Technologies and Materials, Faculty of Special Technology, Alexander Dubček University of Trenčín, Ku Kyselke 469, 911 06 Trenčín, Slovakia
Karol Kyziol
Department of Physical Chemistry and Modelling, Faculty of Materials Science and Ceramics, AGH University of Science and Technology, A. Mickiewicza 30 Av., 30 059 Kraków, Poland
Mária Kaňuchová
Raw Materials Processing Department, Institute of Mountainous Sciences and Environmental Protection, Faculty of Mining, Ecology, Process Control and Geotechnology, Technical University of Košice, Park Komenskeho 19, 043 84 Košice, Slovakia
Dávid Medveď
Institute of Materials Research, Slovak Academy of Sciences, Watsonova 47, 040 01 Košice, Slovakia
Róbert Džunda
Institute of Materials Research, Slovak Academy of Sciences, Watsonova 47, 040 01 Košice, Slovakia
Marta Kianicová
Department of Mechanical Technologies and Materials, Faculty of Special Technology, Alexander Dubček University of Trenčín, Ku Kyselke 469, 911 06 Trenčín, Slovakia
Lukáš Rusinko
Department of Mechanical Technologies and Materials, Faculty of Special Technology, Alexander Dubček University of Trenčín, Ku Kyselke 469, 911 06 Trenčín, Slovakia
Alena Breznická
Department of Mechanical Technologies and Materials, Faculty of Special Technology, Alexander Dubček University of Trenčín, Ku Kyselke 469, 911 06 Trenčín, Slovakia
Mária Csatáryová
Department of Physics, Mathematics and Technologies, Faculty of Humanities and Natural Sciences, University of Presov, Ul. 17 Novembra 1, 080 01 Prešov, Slovakia
This article presents a comparative study of WC and CrC coatings deposited by the plasma-enhanced chemical vapor method using the hexacarbonyls of W and Cr as precursors. The measured thicknesses of the WC and CrC coatings are equal to ca. 1.5 µm. The WC coating consists of microcolumns with a conical end, with gaps between the microcolumns up to approximately 100 nm, and their structure is formed by nanoparticles in the shape of globules with a diameter of up to 10 nm. In the case of the CrC coating, a cauliflower structure with gaps ranging from 20 to 100 nm was achieved. The diameter of cauliflower grains is from 50 nm to 300 nm. The C content in the WC and CrC coating is 66.5 at.% and 75.5 at.%. The W content is 1.4 at.% and the Cr content in the CrC coating is 1.2 at.%. The hardness and Young’s modulus of the WC coating are equal to 9.2 ± 1.2 GPa 440.2 ± 14.2 GPa, respectively. The coefficients of friction and wear volume of the WC coating are equal to 0.7 and −1.6 × 106/+3.3 × 106 µm3, respectively. The hardness and Young’s modulus of the CrC coating are 7.5 ± 1.2 GPa and 280 ± 18.5 GPa, respectively. The coefficients of friction and wear volume of the CrC coating are 0.72 and −18.84 × 106/+0.35 × 106 µm3, respectively.
