Preparation of vitrified bond diamond wheel based on Bi2O3-B2O3 glass system and its grinding performance on monocrystalline silicon

Abstract

To solve the problem of high sintering temperature of vitrified bond, a novel low- temperature vitrified bond based on Bi2O3-B2O3 glass system was proposed. The effect of nano-SiC and nano-ZrO2 on the phase composition, fluidity and mechanical properties of the vitrified bond were analyzed. Additionally, the effect of adding walnut shell powder as a pore-forming agent on the microstructure of the vitrified bond diamond grinding wheel was explored. A vitrified bond diamond cup grinding wheel based on Bi2O3-B2O3 glass system was prepared, and its grinding performance on monocrystalline silicon wafer was tested. The results show that adding nano-SiC powder leads to the formation of Bi in the vitrified bond and destroys the [BiO4] glass network of vitrified bond. The fluidity of the vitrified bond decreases with the addition of nano-SiC and nano- ZrO2. Furthermore, the fluidity, flexural strength and hardness of the vitrified bond increase as the sintering temperature increases. The flexural strength and the hardness of the vitrified bond reach to their highest value at 560 ℃. With the increase of the content of the pore-forming agent, the amount of large pores in the grinding wheel increases significantly and the size becomes larger. The prepared Bi2O3-B2O3 vitrified bond diamond cup grinding wheel (800 mesh or M10/20) was used to grind monocrystalline silicon wafer under specific conditions (linear speed: 12.56 m/s, workpiece speed: 5.23 m/s, and feed speed: 0.1 μm/s). The grinding ratio reaches 790, and the surface roughness of the monocrystalline silicon wafer is 0.16 μm.

Keywords

• vitrified bond diamond grinding wheel
• monocrystalline silicon wafer
• mechanical property
• grinding performance