Films of Co2Fe-Ge Heusler alloy with variable Ge concentration deposited on monocrystalline MgO (100) substrates by magnetron co-sputtering are investigated using microstructural, morphological, magnetometric, and magnetic resonance methods. The films were found to grow epitaxially, with island-like or continuous-layer morphology depending the Ge-content. The ferromagnetic resonance data versus out-of-plane and in-plane angle indicate the presence of easy plane and 4-fold in-plane anisotropy. The magnetometry data indicate additional weak 2-fold in-plane anisotropy and pronounced at low fields rotatable anisotropy. The observed magnetic anisotropy properties discussed in correlation with the microstructure and morphology of the films.
