Synthesis of diamond structures from the coaxial flows of Н2 and Н2+СН4 mixture

Abstract

The work presents the results of experiments on the diamond gas-jet synthesis from methane and hydrogen mixture, flowing from coaxial channels under the following conditions: temperature of the hydrogen activating surface of 2400 K, pressure in the deposition chamber of 20 Torr, different gas fluxes, and different CH4 concentrations. The Direct Simulation Monte Carlo method for numerical analysis of experiments was applied.