Generating multi-component multi-layer coatings type mecraly using multi-cathode magnetron sputtering systems

Abstract

The paper presents the results of experiments carried out to obtain multi-component coatings that have a broader range of properties compared to their single-component counterparts. We have studied the generation of coatings based on a Co (18…20%)-Cr (5…7%)-Al (0.3…0.4%)-Y (0.2…0.5) alloy. We have also studied the chemical composition of the coating, its thickness, and the transient zone condition. We present here the results of X-ray fluorescence and X-ray spectroscopy microanalysis of such coatings. It is shown that the microtopography of surfaces depends on the coating generation conditions; the set of chemical elements in each coating is similar for all specimen, their concentration depends on the deposition conditions, and the thickness distribution is constant; there is virtually no diffusion of coating and substrate materials. We have identified an insignificant percentage of substrate materials in the generated coating. The thicker the coating, the less substrate materials it contains.