Studies of dynamic spatio-temporal processes of electrons in a 50 kHz/5 MHz dual-frequency dielectric barrier discharge plasma at atmospheric pressure

Abstract

Dual-frequency excitation of dielectric barrier discharge (DBD) plasma reactors, where the plasma is generated by a low-frequency (LF) source and modulated by a radio-frequency (RF) source, have been widely adopted in the low-pressure regime. However, the impacts of the RF voltage and LF voltage amplitudes on the plasma parameters, including the spatiotemporal distributions of ion and electron densities, electron dynamics, and gas temperatures, remain poorly understood in the atmospheric pressure regime. The present work addresses this issue by conducting joint experimental and simulation studies for an atmospheric-pressure 50 kHz/5 MHz dual-frequency driven DBD plasma reactor based on phase-resolved optical emission spectra and a drift–diffusion model. The results demonstrate that the dynamic spatiotemporal behaviors of electrons change dramatically as the voltage of the RF component increases from 50 V to 300 V with the voltage of the LF component fixed at 1 kV. Moreover, the RF component is further demonstrated to modulate other plasma characteristics, such as particle densities, gas temperature, and argon emissions. These results contribute toward the tailoring of the non-equilibrium and nonlinear plasma parameters obtained under atmospheric pressure conditions.

Keywords

• Atmospheric pressure plasma
• Dielectric barrier discharge
• Electron power absorption
• Dual-frequency discharge
• Electron dynamic