Nature Communications (Oct 2020)
Toward three-dimensional hybrid inorganic/organic optoelectronics based on GaN/oCVD-PEDOT structures
- Linus Krieg,
- Florian Meierhofer,
- Sascha Gorny,
- Stefan Leis,
- Daniel Splith,
- Zhipeng Zhang,
- Holger von Wenckstern,
- Marius Grundmann,
- Xiaoxue Wang,
- Jana Hartmann,
- Christoph Margenfeld,
- Irene Manglano Clavero,
- Adrian Avramescu,
- Tilman Schimpke,
- Dominik Scholz,
- Hans-Jürgen Lugauer,
- Martin Strassburg,
- Jörgen Jungclaus,
- Steffen Bornemann,
- Hendrik Spende,
- Andreas Waag,
- Karen K. Gleason,
- Tobias Voss
Affiliations
- Linus Krieg
- Institute of Semiconductor Technology and Laboratory for Emerging Nanometrology, Technische Universität Braunschweig
- Florian Meierhofer
- Institute of Semiconductor Technology and Laboratory for Emerging Nanometrology, Technische Universität Braunschweig
- Sascha Gorny
- Institute of Semiconductor Technology and Laboratory for Emerging Nanometrology, Technische Universität Braunschweig
- Stefan Leis
- Institute of Semiconductor Technology and Laboratory for Emerging Nanometrology, Technische Universität Braunschweig
- Daniel Splith
- Felix-Bloch-Institut für Festkörperphysik, Universität Leipzig
- Zhipeng Zhang
- Felix-Bloch-Institut für Festkörperphysik, Universität Leipzig
- Holger von Wenckstern
- Felix-Bloch-Institut für Festkörperphysik, Universität Leipzig
- Marius Grundmann
- Felix-Bloch-Institut für Festkörperphysik, Universität Leipzig
- Xiaoxue Wang
- Department of Chemical Engineering, Massachusetts Institute of Technology
- Jana Hartmann
- Institute of Semiconductor Technology and Laboratory for Emerging Nanometrology, Technische Universität Braunschweig
- Christoph Margenfeld
- Institute of Semiconductor Technology and Laboratory for Emerging Nanometrology, Technische Universität Braunschweig
- Irene Manglano Clavero
- Institute of Semiconductor Technology and Laboratory for Emerging Nanometrology, Technische Universität Braunschweig
- Adrian Avramescu
- OSRAM Opto Semiconductors GmbH
- Tilman Schimpke
- OSRAM Opto Semiconductors GmbH
- Dominik Scholz
- OSRAM Opto Semiconductors GmbH
- Hans-Jürgen Lugauer
- OSRAM Opto Semiconductors GmbH
- Martin Strassburg
- OSRAM Opto Semiconductors GmbH
- Jörgen Jungclaus
- Institute of Semiconductor Technology and Laboratory for Emerging Nanometrology, Technische Universität Braunschweig
- Steffen Bornemann
- Institute of Semiconductor Technology and Laboratory for Emerging Nanometrology, Technische Universität Braunschweig
- Hendrik Spende
- Institute of Semiconductor Technology and Laboratory for Emerging Nanometrology, Technische Universität Braunschweig
- Andreas Waag
- Institute of Semiconductor Technology and Laboratory for Emerging Nanometrology, Technische Universität Braunschweig
- Karen K. Gleason
- Department of Chemical Engineering, Massachusetts Institute of Technology
- Tobias Voss
- Institute of Semiconductor Technology and Laboratory for Emerging Nanometrology, Technische Universität Braunschweig
- DOI
- https://doi.org/10.1038/s41467-020-18914-7
- Journal volume & issue
-
Vol. 11,
no. 1
pp. 1 – 10
Abstract
Though integrating functional organic materials with semiconductor nanostructures is attractive for 3D chip processing, realizing these hybrids remains a challenge. Here, the authors report an oxidative chemical vapor deposition-based process for designing novel 3D hybrid optoelectronic structures.
