Advanced Electronic Materials (Dec 2023)

In‐Plane AlN‐Based Actuator: Toward a New Generation of Piezoelectric MEMS

  • Kristina Bespalova,
  • Tarmo Nieminen,
  • Artem Gabrelian,
  • Glenn Ross,
  • Mervi Paulasto‐Kröckel

DOI
https://doi.org/10.1002/aelm.202300721
Journal volume & issue
Vol. 9, no. 12
pp. n/a – n/a

Abstract

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No abstracts available.