Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS)
Masaomi Sanekata,
Hiroshi Nishida,
Tatsuya Watabe,
Yuki Nakagomi,
Yoshihiro Hirai,
Nobuo Nishimiya,
Masahide Tona,
Hiroaki Yamamoto,
Naoyuki Hirata,
Keizo Tsukamoto,
Keijiro Ohshimo,
Fuminori Misaizu,
Kiyokazu Fuke
Affiliations
Masaomi Sanekata
Faculty of Engineering, Tokyo Polytechnic University, Atsugi Kanagawa 243-0297, Japan
Hiroshi Nishida
Faculty of Engineering, Tokyo Polytechnic University, Atsugi Kanagawa 243-0297, Japan
Tatsuya Watabe
Faculty of Engineering, Tokyo Polytechnic University, Atsugi Kanagawa 243-0297, Japan
Yuki Nakagomi
Faculty of Engineering, Tokyo Polytechnic University, Atsugi Kanagawa 243-0297, Japan
Yoshihiro Hirai
Faculty of Engineering, Tokyo Polytechnic University, Atsugi Kanagawa 243-0297, Japan
Nobuo Nishimiya
Faculty of Engineering, Tokyo Polytechnic University, Atsugi Kanagawa 243-0297, Japan
Masahide Tona
Ayabo Corporation, Anjo Aichi 446-0052, Japan
Hiroaki Yamamoto
Ayabo Corporation, Anjo Aichi 446-0052, Japan
Naoyuki Hirata
Ayabo Corporation, Anjo Aichi 446-0052, Japan
Keizo Tsukamoto
Ayabo Corporation, Anjo Aichi 446-0052, Japan
Keijiro Ohshimo
Department of Chemistry, Graduate School of Science, Tohoku University, Sendai 980-8578, Japan
Fuminori Misaizu
Department of Chemistry, Graduate School of Science, Tohoku University, Sendai 980-8578, Japan
Kiyokazu Fuke
Toyota Physical and Chemical Research Institute, Nagakute Aichi 480-1192, Japan
Delayed discharges due to electrical breakdown are observed in modulated pulsed pow er magnetron sputtering (MPPMS) plasma of titanium. The delayed discharge, which is remarkable with decreasing argon gas pressure, transforms the discharge current waveform from a standard modulated pulsed discharge current waveform to a comb-like discharge current waveform consisting of several pulses with high power. In addition, the delay times, consisting of statistical times and formative times in the delayed MPPMS discharges, are experimentally measured with the help of Laue plot analysis. The pressure dependence of delay times observed indicates that the delayed discharge behavior matches the breakdown characteristics well. In the present study, the delayed discharge dynamics of the comb-like discharge current waveform, which can be the origin of deep oscillation magnetron sputtering, are investigated based on measurement of the delay times and the characteristics of discharge current waveforms.
