Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification

Abstract

The modification of the surface structure of the hybrid coating TiN/Al2O3 with a low-energy high-current electron beam (NCEB) is performed. The surface roughness is considered as a function of beam current. Surfaces of the obtained samples are investigated within the two-dimensional multifractal detrended fluctuation analysis (MF-DFA). The multifractal spectrum of the surface is calculated as a quantitative parameter of the roughness. It is shown that with the increase of the beam energy, the surface become more regular and uniform.

Keywords

• self-similarity
• fractal dimension
• hybrid coating
• high-current electron beam(s) effect