Small-angle Sensor Based on the SPR Technology and Heterodyne Interferomery

Shinn-Fwu Wang; Ming-Hung Chiu; Lih-Horng Shyu; Rong-Seng Chang

Sensors & Transducers (May 2008)

Small-angle Sensor Based on the SPR Technology and Heterodyne Interferomery

Shinn-Fwu Wang ,
Ming-Hung Chiu,
Lih-Horng Shyu,
Rong-Seng Chang

Affiliations

Shinn-Fwu Wang: Department of Electronic Engineering, Ching Yun University, No.229, Chien-Hsin Rd., Jhongli City, Taoyuan, 320, Taiwan, R.O.C.
Ming-Hung Chiu: Department of Electro-Optical Engineering, National Formosa University, No. 64, Wunhua Road, Huwei Yunlin 632, Taiwan, R.O.C.
Lih-Horng Shyu: Department of Electro-Optical Engineering, National Formosa University, No. 64, Wunhua Road, Huwei Yunlin 632, Taiwan, R.O.C.
Rong-Seng Chang: Institute of Optical Sciences, National Central University,No.300, Jhongda Rd., Jhongli City, Taoyuan, 320, Taiwan, R.O.C.

Journal volume & issue: Vol. 92, no. 5
pp. 16 – 23

Abstract

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A small-angle sensor based on the surface plasmon resonance (SPR) technology and heterodyne interferometry is proposed. In the paper, we try to measure the phase difference variation between s and p polarizations due to attenuated total reflection (ATR). The phase difference variation depends on the incident angle. Therefore, only evaluating the phase difference variation can perform small-angle measurement. The resolution of the method can reach 2.4 x 10-7 radian. The method has some merits, e.g., a simple optical setup, easy operation, high measurement accuracy, high resolution, rapid measurement, and high stability etc. And its feasibility is demonstrated.

Published in Sensors & Transducers

ISSN: 2306-8515 (Print); 1726-5479 (Online)
Publisher: IFSA Publishing, S.L.
Country of publisher: Spain
LCC subjects: Technology: Technology (General)
Website: http://www.sensorsportal.com/HTML/DIGEST/New_Digest.htm

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