Design and analysis of a 2 dimensional micro-gripper by using of rotational displacement of clamped perpendicular micro-beams due to piezoelectric actuation

Abstract

As regards to daily developments in micro/nano technology and very special intricate missions in micro/nano scale, many researches focused on manipulation and movement in correspond scales. Micro-grippers are end effectors of micro/nano manipulation systems which perform some duties such as holding, picking up, moving and cutting. In this research a micro-gripper has been introduced which consists of two perpendicular Micro-beams. Each Micro-beam has an elastic layer and two piezoelectric layer. One of these piezoelectric layers is used for actuation and another one for sense and feedback control. First static equations of Micro-beam presented. Kinematics of Micro-gripper including direct and inverse kinematics and static displacement has been presented. Eventually Micro-gripper workspace for a Micro-beam’s ultimate displacement has been specified. The results have been verified by FEM software. The difference between the analytical results of displacements in different directions with the corresponding results of finite element software output is about 2 percent. Therefore, the results indicate the accuracy and efficiency of the proposed method and the current research can be a framework and foundation for the analysis of similar systems with more complex geometry.

Keywords

• microelectromechanical systems (mems)
• micro-gripper
• displacement
• piezoelectric