Full-Self-Powered Humidity Sensor Based on Electrochemical Aluminum–Water Reaction
Marko V. Bošković,
Biljana Šljukić,
Dana Vasiljević Radović,
Katarina Radulović,
Milena Rašljić Rafajilović,
Miloš Frantlović,
Milija Sarajlić
Affiliations
Marko V. Bošković
Department of Microelectronic Technologies, Institute of Chemistry, Technology, and Metallurgy, University of Belgrade, Njegoševa 12, 11000 Belgrade, Serbia
Biljana Šljukić
Faculty of Physical Chemistry, University of Belgrade, Studentski Trg 12-16, 11158 Belgrade, Serbia
Dana Vasiljević Radović
Department of Microelectronic Technologies, Institute of Chemistry, Technology, and Metallurgy, University of Belgrade, Njegoševa 12, 11000 Belgrade, Serbia
Katarina Radulović
Department of Microelectronic Technologies, Institute of Chemistry, Technology, and Metallurgy, University of Belgrade, Njegoševa 12, 11000 Belgrade, Serbia
Milena Rašljić Rafajilović
Department of Microelectronic Technologies, Institute of Chemistry, Technology, and Metallurgy, University of Belgrade, Njegoševa 12, 11000 Belgrade, Serbia
Miloš Frantlović
Department of Microelectronic Technologies, Institute of Chemistry, Technology, and Metallurgy, University of Belgrade, Njegoševa 12, 11000 Belgrade, Serbia
Milija Sarajlić
Department of Microelectronic Technologies, Institute of Chemistry, Technology, and Metallurgy, University of Belgrade, Njegoševa 12, 11000 Belgrade, Serbia
A detailed examination of the principle of operation behind the functioning of the full-self-powered humidity sensor is presented. The sensor has been realized as a structure consisting of an interdigitated capacitor with aluminum thin-film digits. In this work, the details of its fabrication and activation are described in detail. The performed XRD, FTIR, SEM, AFM, and EIS analyses, as well as noise measurements, revealed that the dominant process of electricity generation is the electrochemical reaction between the sensor’s aluminum electrodes and the water from humid air in the presence of oxygen, which was the main goal of this work. The response of the sensor to human breath is also presented as a demonstration of its possible practical application.
