Multi-angle spectrophotometry as a tool for determination of film parameters on single-layer structures

Abstract

Ta–Si–C–N single-layer films have been synthesized by direct current magnetron sputtering on fused quartz substrates. The structural perfection of the films has been studied using X-ray diffraction, scanning electron microscopy and glow discharge optical emission spectroscopy. The optical parameters of the films have been studied using multi-angle spectrophotometry. The spectral dependences of the transmission coefficients of substrates and structures were measured for normal incidence of light in the wavelength range 200–2500 nm. We show that the transmittance spectrum of the specimen has an oscillating pattern due to interference phenomena that are typical for layered structures. The reflectance of the films and the substrates has been measured in the 200–2500 nm region for small incidence angles. The difference between the reflection coefficient at the maximum of the interference of the film and the corresponding reflection coefficient of the substrate at the same wavelength shows that the absorption in the film is low. A formula for determination of the film absorption index based on the measured parameters has been derived. The experimental and calculated data have been used for plotting the absorption spectra of the substrate, structure and film. Discrete refractive indices in the 400–1200 nm region have been calculated for reflections at two incidence angles by determining the positions of interference maxima in the reflectivity spectral responses. The results have been approximated using the Cauchy equation. The film thickness has been estimated to be df = 1046 nm ± 13%. The spectra of film extinction coefficients have been plotted with and without allowance for reflection. Obtained values of the refractive and absorption indices with and without reflection have been summarized in a table.