A Self-Temperature Compensation Barometer Based on All-Quartz Resonant Pressure Sensor

Abstract

This paper reports a self-temperature compensation barometer based on a quartz resonant pressure sensor. A novel sensor chip that contains a double-ended tuning fork (DETF) resonator and a single-ended tuning fork (SETF) resonator is designed and fabricated. The two resonators are designed on the same diaphragm. The DETF resonator works as a pressure sensor. To reduce the influence of the temperature drift, the SETF resonator works as a temperature compensation sensor, which senses the instantaneous temperature of the DETF resonator. The temperature compensation method based on polynomial fitting is studied. The experimental results show that the accuracy is 0.019% F.S. in a pressure range of 200~1200 hPa over a temperature range of −20 °C~+60 °C. The absolute errors of the barometer are within ±23 Pa. To verify its actual performance, a drone flight test was conducted. The test results are consistent with the actual flight trajectory.

Keywords

• barometer
• quartz crystal resonator
• MEMS
• high accuracy
• temperature compensation
• finite element method (FEM)