Nano indentation studies on ceramic thinfilms coatings deposited using sputtering process for energy applications

G. Vijaya; Singh M. Muralidhar; Manish Kumar; Amit Kumar; M.S. Ashok Kumar; Dheeraj Kumar; Shatrudhan Pandey; S.M. Mozammil Hasnain; Abhishek Kumar Singh; Gaurav Kumar

Materials Science for Energy Technologies (Jan 2024)

Nano indentation studies on ceramic thinfilms coatings deposited using sputtering process for energy applications

G. Vijaya,
Singh M. Muralidhar,
Manish Kumar,
Amit Kumar,
M.S. Ashok Kumar,
Dheeraj Kumar,
Shatrudhan Pandey,
S.M. Mozammil Hasnain,
Abhishek Kumar Singh,
Gaurav Kumar

Affiliations

G. Vijaya: Department of Mechanical Engineering, Dayananda Sagar College of Engineering, Bangalore 560078, India
Singh M. Muralidhar: Department of Mechanical Engineering, RV Institute of Technology and Management, Chaithanya Layout, 8th Phase, J. P. Nagar, Bengaluru 560076, India
Manish Kumar: Department of Mechanical Engineering, RV Institute of Technology and Management, Chaithanya Layout, 8th Phase, J. P. Nagar, Bengaluru 560076, India
Amit Kumar: Department of Mechanical Engineering, Sri Eshwar College of Engineering, Coimbatore 641202, India
M.S. Ashok Kumar: Department of Mechanical Engineering, Dayananda Sagar College of Engineering, Bangalore 560078, India
Dheeraj Kumar: Department of Mechanical Engineering, National Institute of Technology, Durgapur 713209, India
Shatrudhan Pandey: Department of Production and Industrial Engineering, Birla Institute of Technology, Mesra, Ranchi 835215, India; Corresponding authors.
S.M. Mozammil Hasnain: Faculty of Engineering and Applied Science, Usha Martin University, Ranchi 835103, India; Corresponding authors.
Abhishek Kumar Singh: Department of Production and Industrial Engineering, Birla Institute of Technology, Mesra, Ranchi 835215, India
Gaurav Kumar: Faculty of Engineering and Applied Science, Usha Martin University, Ranchi 835103, India; Corresponding authors.

Journal volume & issue: Vol. 7
pp. 115 – 123

Abstract

Read online

Nanoindentation technique is generally used for measuring thinfilm mechanical properties such as hardness, modulus and stiffness. Nanoindentation of ceramic thinfilms of SiO2, Si3N4 and Al2O3 was deposited by radio-frequency (RF) magnetron sputtering on the stainless steel (SS304) substrates using a nanoindenter. Under varied sputtering conditions, the “as-deposited” film was amorphous. The as-deposited thin film had a thickness of 200 nm. The amorphous film was loaded/unloaded only once while operating in load control mode. Hardness and Young's modulus, two mechanical properties of the ceramic thinfilms, were also measured. When SiO2, Si3N4, and Al2O3 thinfilms are deposited onto stainless steel substrates using an RF magnetron sputtering, the roughness of the ceramic thinfilms is in the range of 8 to 12 nm. The nanoindentation results were compared, the hardness of the coatings is in the range of 6 to 9 GPa, and these ceramic coatings can be used as an adhesive layer for multilayer thin film coating.

Published in Materials Science for Energy Technologies

ISSN: 2589-2991 (Online)
Publisher: KeAi Communications Co., Ltd.
Country of publisher: China
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials; Technology: Mechanical engineering and machinery: Energy conservation
Website: https://www.keaipublishing.com/en/journals/materials-science-for-energy-technologies/

About the journal

Abstract

Keywords