Preparation of 0.055BaZrO3–0.935(K0.45Na0.5Li0.05)NbO3–0.01(Bi0.5Na0.5)TiO3 piezoelectric thin films from precursor solution by Pechini method

Abstract

Lead-free piezoelectric thin films of 0.055BaZrO3–0.935(K0.45Na0.5Li0.05)NbO3–0.01(Bi0.5Na0.5)TiO3 (BZ–KNLN–BNT) were fabricated on (100)-LaNiO3/SiO2/Si substrates. The Pechini (polymeric precursor) method was carried out to prepare the complicated multi-component precursor solution. This method was suited for controlling the complex components accurately. The films crystallized at 700∘C showed a (100)pc-oriented perovskite structure, whose grain size was about 200nm and thickness was about 700nm. The Curie temperature Tc of the films was 292∘C that was near to that of the bulk ceramics. The preparation method used in this work provided a possibility for the application of multi-component lead-free piezoelectric films.

Keywords

• Lead-free piezoelectric materials
• thin films
• Pechini method
• sol–gel method