Innovative hybrid analysis for underwater MEMS sensor imitating veterinary cilia optimum structure

Abstract

Veterinary species cilia sense mechanical vibrations and movements in air as well as in water. They allow fish to locate predators and find prey. Cilium participates in detection of sound vibration phonons and determines underwater pathways. In this paper a hybrid software tool packages are used to study, analyze, and determine optimum dimensions of MEMS sensor imitating fish cilia.The availability of powerful Finite-element software such as COMSOL and the new software generations of computer make it possible to investigate the performance of different types of sensor structures and to propose new ones. MEMS Piezoresistive Vector Hydrophone (MPVH) is one of the recent generations of underwater vibration detection and surveillance devices. In this paper basic design structure of MPVH that is found in many research works is modeled and investigated from points of view of sensor parameters, namely sensor sensitivity, frequency response and linearity. A hybrid optimization technique is deduced to attain sensor's best element dimension and performance.

Keywords

• Vector hydrophone
• Piezoresistivity
• Resonance frequency
• Optimisation