Energy control of neutral oxygen particles passing through an aperture electrode

Takeo Ohno; Daiki Nakayama; Takeru Okada; Seiji Samukawa

Results in Physics (Mar 2018)

Energy control of neutral oxygen particles passing through an aperture electrode

Takeo Ohno,
Daiki Nakayama,
Takeru Okada,
Seiji Samukawa

Affiliations

Takeo Ohno: WPI – Advanced Institute for Materials Research (WPI-AIMR), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan; Japan Science and Technology Agency (JST), PRESTO, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan; Corresponding author at: WPI – Advanced Institute for Materials Research (WPI-AIMR), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan.
Daiki Nakayama: Institute of Fluid Science (IFS), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan
Takeru Okada: Institute of Fluid Science (IFS), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan
Seiji Samukawa: WPI – Advanced Institute for Materials Research (WPI-AIMR), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan; Institute of Fluid Science (IFS), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan

Journal volume & issue: Vol. 8
pp. 169 – 171

Abstract

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The kinetic energy of neutralized oxygen particles passing through an aperture electrode was measured by a quadrupole mass spectrometer. The peak energy position was controlled by changing the plasma source power, acceleration bias power, and gas pressure in the vacuum chamber. Keywords: Beam energy, Neutralized plasma particle, Oxygen plasma

Published in Results in Physics

ISSN: 2211-3797 (Online)
Publisher: Elsevier
Country of publisher: Netherlands
LCC subjects: Science: Physics
Website: http://www.journals.elsevier.com/results-in-physics/

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