Enhanced Conductivity and Microstructure in Highly Textured TiN1–x/c‑Al2O3 Thin Films

• Alexander Zintler,
• Robert Eilhardt,
• Stefan Petzold,
• Sankaramangalam Ulhas Sharath,
• Enrico Bruder,
• Nico Kaiser,
• Lambert Alff,
• Leopoldo Molina-Luna

Affiliations

Alexander Zintler

Advanced Electron Microscopy, Institute of Materials Science, TU Darmstadt, Darmstadt, Germany

Robert Eilhardt

Advanced Electron Microscopy, Institute of Materials Science, TU Darmstadt, Darmstadt, Germany

Stefan Petzold

Advanced Thin Film Technology, Institute of Materials Science, TU Darmstadt, Darmstadt, Germany

Sankaramangalam Ulhas Sharath

Advanced Thin Film Technology, Institute of Materials Science, TU Darmstadt, Darmstadt, Germany

Enrico Bruder

Physical Metallurgy, Institute of Materials Science, TU Darmstadt, Darmstadt, Germany

Nico Kaiser

Advanced Thin Film Technology, Institute of Materials Science, TU Darmstadt, Darmstadt, Germany

Lambert Alff

Advanced Thin Film Technology, Institute of Materials Science, TU Darmstadt, Darmstadt, Germany

Leopoldo Molina-Luna

Advanced Electron Microscopy, Institute of Materials Science, TU Darmstadt, Darmstadt, Germany