Demonstration of the Optical Isotropy of TiO₂ Thin Films Prepared by the Sol–Gel Method

Abstract

Titanium dioxide (TiO2) thin films prepared by the sol–gel technique have been shown to be optically isotropic and, unlike the films obtained by competitive methods, do not exhibit measurable birefringence. A series of submicrometer-thin titanium dioxide films were prepared using the sol–gel technique and then thermally annealed at different temperatures. The samples were analyzed by spectroscopic ellipsometry using the Mueller matrix formalism, X-ray diffractometry and scanning electron microscopy. The conversion of amorphous titanium dioxide to polycrystalline anatase occurred at 400 °C or higher. Crystallites of a few percent of the film thickness were observed. Nevertheless, the crystallization process did not trigger the appearance of birefringence. These observations demonstrate that high-quality planar optical waveguides can be successfully fabricated on flexible substrates, in particular those composed of efficient polymers that can withstand the aforementioned temperatures.

Keywords

• titanium dioxide
• spectroscopic ellipsometry
• thin layers
• sol–gel
• planar optical waveguides