The Key Lab of Micro-Nano Electronics and System Integration of Xi’an City, School of Microelectronics, Faculty of Electronic and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Yongqing Yue
The Key Lab of Micro-Nano Electronics and System Integration of Xi’an City, School of Microelectronics, Faculty of Electronic and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Zhaozhao Liang
The Key Lab of Micro-Nano Electronics and System Integration of Xi’an City, School of Microelectronics, Faculty of Electronic and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Xiaolong Zhao
The Key Lab of Micro-Nano Electronics and System Integration of Xi’an City, School of Microelectronics, Faculty of Electronic and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Fangpei Li
The Key Lab of Micro-Nano Electronics and System Integration of Xi’an City, School of Microelectronics, Faculty of Electronic and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Wenbo Peng
The Key Lab of Micro-Nano Electronics and System Integration of Xi’an City, School of Microelectronics, Faculty of Electronic and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Quanzhe Zhu
Shaanxi Advanced Semiconductor Technology Center Co., Ltd., Xi’an 710077, China
Yongning He
The Key Lab of Micro-Nano Electronics and System Integration of Xi’an City, School of Microelectronics, Faculty of Electronic and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China
A Lamb wave is a guided wave that propagates within plate-like structures, with its vibration mode resulting from the coupling of a longitudinal wave and a shear vertical wave, which can be applied in sensors, filters, and frequency control devices. The working principle of Lamb wave sensors relies on the excitation and propagation of this guided wave within piezoelectric material. Lamb wave sensors exhibit significant advantages in various sensing applications due to their unique wave characteristics and design flexibility. Compared to traditional surface acoustic wave (SAW) and bulk acoustic wave (BAW) sensors, Lamb wave sensors can not only achieve higher frequencies and quality factors in smaller dimensions but also exhibit superior integration and multifunctionality. In this paper, we briefly introduce Lamb wave sensors, summarizing methods for enhancing their sensitivity through optimizing electrode configurations and adjusting piezoelectric thin plate structures. Furthermore, this paper systematically explores the development of Lamb wave sensors in various sensing applications and provides new insights into their future development.
