Feasibility Study of Cooling a Bulk Acoustic Wave Resonator by Nanoparticle Enhanced Phase Change Material

Abstract

In the current study, the coupling of a cooling problem with the electromagnetic resonance of a bulk acoustic wave (BAW) material is investigated. As well, a new cooling method by the addition of nanoparticles to a phase change material surrounding the BAW resonator is presented. To solve the governing equations of piezoelectric charge and momentum balance, thermal balance, and fluid flow a code with the method of finite element is introduced. After validation of various features of the code with melting profile, heat generation, charge curve, and dispersion curve with benchmarks, the eigenfrequency analysis of the system is done. The thermal behavior of the system at first mode and various boundary conditions are studied. As well, the effect of nanoparticles in fastening the cooling of the BAW resonator is demonstrated.

Keywords

• bulk acoustic waves
• filter design
• thermal management
• MEMS
• phase change material
• nanofluid