Fabrication and characterization of strain-induced graphene for chemisorption-based graphene resonant mass sensors

Viet Khoa Pham; Motoki Kato; Jumpei Uesaka; Rintaro Tsubouchi; Kousuke Go; Yong-Joon Choi; Toshihiko Noda; Kazuaki Sawada; Kazuhiro Takahashi

doi:10.35848/1882-0786/ad94cc

Applied Physics Express (Jan 2024)

Fabrication and characterization of strain-induced graphene for chemisorption-based graphene resonant mass sensors

Viet Khoa Pham,
Motoki Kato,
Jumpei Uesaka,
Rintaro Tsubouchi,
Kousuke Go,
Yong-Joon Choi,
Toshihiko Noda,
Kazuaki Sawada,
Kazuhiro Takahashi

Affiliations

Viet Khoa Pham: Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, Japan
Motoki Kato: Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, Japan
Jumpei Uesaka: Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, Japan
Rintaro Tsubouchi: Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, Japan
Kousuke Go: Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, Japan
Yong-Joon Choi: ORCiD; Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, Japan
Toshihiko Noda: ORCiD; Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, Japan; Institute for Research on Next-generation Semiconductor and Sensing Science (IRES2), Toyohashi University of Technology , Toyohashi, Aichi 441-8580, Japan
Kazuaki Sawada: Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, Japan; Institute for Research on Next-generation Semiconductor and Sensing Science (IRES2), Toyohashi University of Technology , Toyohashi, Aichi 441-8580, Japan
Kazuhiro Takahashi: Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology , Toyohashi, Aichi 441-8580, Japan; Institute for Research on Next-generation Semiconductor and Sensing Science (IRES2), Toyohashi University of Technology , Toyohashi, Aichi 441-8580, Japan

DOI: https://doi.org/10.35848/1882-0786/ad94cc
Journal volume & issue: Vol. 17, no. 12
p. 127001

Abstract

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We propose a strain application process and structure for a chemisorption-based resonant mass sensor using graphene, aiming to develop a novel sensing platform with high sensitivity and selectivity. The results demonstrate the successful application of 0.26%–0.30% strain to suspended graphene through the thermal shrinkage of SU-8, resulting in a 25% improvement in resonance characteristics. Furthermore, we demonstrated the mass sensing of severe acute respiratory syndrome coronavirus 2 (SARS-CoV-2) spikes chemisorbed on the strain-applied graphene resonant mass sensor, achieving a mass sensitivity 149,000 times higher than that of silicon-based chemisorption mass sensors.

Published in Applied Physics Express

ISSN: 1882-0778 (Print); 1882-0786 (Online)
Publisher: IOP Publishing
Country of publisher: United Kingdom
LCC subjects: Science: Physics
Website: https://iopscience.iop.org/journal/1882-0786

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