Guided-wave photodetectors in germanium on optical chips in silicon-on-insulator

Abstract

We report the integration of near-infrared waveguide photodetectors in polycrystalline Germanium with Silicon on Insulator optical chips for power monitor applications. We discuss design and fabrication of the devices as well as their characterization in terms of dark current, responsivity and signal to noise ratio.

Keywords

• germanium
• photodetectors
• optical chips