ACS Omega
(Dec 2018)
Shape Transformation Photolithography: Self-Assembled Arrays of Suspended MEMS Structures from Patterned Polymer Membranes
- Andriy Sherehiy,
- Jeremy M. Rathfon,
- Hiroya Abe,
- Sri Sukanta Chowdhury,
- Robert W. Cohn
Affiliations
- Andriy Sherehiy
- ElectroOptics Research Institute and Nanotechnology Center, University of Louisville, Louisville, Kentucky, United States
- Jeremy M. Rathfon
- ElectroOptics Research Institute and Nanotechnology Center, University of Louisville, Louisville, Kentucky, United States
- Hiroya Abe
- ElectroOptics Research Institute and Nanotechnology Center, University of Louisville, Louisville, Kentucky, United States
- Sri Sukanta Chowdhury
- ElectroOptics Research Institute and Nanotechnology Center, University of Louisville, Louisville, Kentucky, United States
- Robert W. Cohn
- ElectroOptics Research Institute and Nanotechnology Center, University of Louisville, Louisville, Kentucky, United States
- DOI
-
https://doi.org/10.1021/acsomega.8b02763
- Journal volume & issue
-
Vol. 3,
no. 12
pp.
18489
– 18498
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