Diamond Coated LW-SAW Sensors-Study of Diamond Thickness Effect

Abstract

This study focuses on the fabrication and characterization of Love wave surface acoustic wave (LW-SAW) sensors with a thin nano-crystalline diamond (NCD) coating with an integrated microfluidics system. The effect of diamond layer thickness on the acoustic wave phase velocity and the sensor’s sensitivity have been investigated experimentally and compared with theoretical simulations. The fabricated sensors have been tested with a several liquids using a home-made microfluidics system.

Keywords

• Love waves
• acoustic sensors
• CVD diamond
• sensing in liquids