Research Progress of the Preparation， Properties and Application of Molybdenum Nitride Films

Abstract

As a typical representative of transition metal nitride，molybdenum nitride exhibits notable electrical conductivity，excellent mechanical properties， and electrochemistry performance， making it promising in a wide range of applications such as catalysis， energy storage， integrated circuits， and protective coatings.However， there are few molybdenum nitride film-related review articles in Chinese.In this paper， the molecular structure， physical and mechanical properties of molybdenum nitride were first summarized， and then the main preparation methods of molybdenum nitride film were summarized， including solution method， sputtering method， atomic layer deposition method， and chemical vapor deposition method.Meanwhile，the advantages and disadvantages of these methods and their applicable scenarios were summarized.Finally，the potential application prospects of molybdenum nitride film were summarized and prospected.

Keywords

• molybdenum nitride film|physical properties|mechanical properties|preparation methods； application