Emerging low-dimensional materials for nanoelectromechanical systems resonators

Abstract

Low-dimensional materials (LDMs), due to exotic mechanical, optical and electrical properties enhanced by ultrahigh surface-to-volume ratio and quantum confinements, have taken centerstage in nanoelectromechanical system (NEMS) resonators. The ability to survive from high strains and complex environments enables LDMs-based NEMS resonators innovative effectuations for mass-, gas- and bio-sensings and computings. In this review, we highlighted the fabrication, actuation, detection, figure of merit, influence factors and recent process of LDMs-based NEMS resonators. After overviewing representative applications and feasible directions, we summarized the confronted challenges in fabrications, tunings and utilizations of LDMs-based NEMS resonators. Finally, the prospects that may properly tackle these obstacles were concluded, attempting to offer useful guidelines for both theoretical and experimental experts to promote NEMS resonators one step closer toward industrializations.

Keywords

• NEMS resonators
• low-dimensional materials
• actuations and detections
• applications