Proceedings (Jun 2019)
Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device
- Anton Köck,
- Marco Deluca,
- Florentyna Sosada-Ludwikowska,
- Günther Maier,
- Robert Wimmer Teubenbacher,
- Martin Sagmeister,
- Karl Rohracher,
- Ewald Wachmann,
- Jan Steffen Niehaus,
- Sören Becker,
- Öznur Tokmak,
- Hendrik Schlicke,
- Alexander Blümel,
- Karl Popovic,
- Martin Tscherner
Affiliations
- Anton Köck
- Materials Center Leoben Forschung GmbH, Roseggerstraße 12, 8700 Leoben, Austria
- Marco Deluca
- Materials Center Leoben Forschung GmbH, Roseggerstraße 12, 8700 Leoben, Austria
- Florentyna Sosada-Ludwikowska
- Materials Center Leoben Forschung GmbH, Roseggerstraße 12, 8700 Leoben, Austria
- Günther Maier
- Materials Center Leoben Forschung GmbH, Roseggerstraße 12, 8700 Leoben, Austria
- Robert Wimmer Teubenbacher
- Materials Center Leoben Forschung GmbH, Roseggerstraße 12, 8700 Leoben, Austria
- Martin Sagmeister
- ams AG, Tobelbader Strasse 30, 8141 Unterpremstaetten, Austria
- Karl Rohracher
- ams AG, Tobelbader Strasse 30, 8141 Unterpremstaetten, Austria
- Ewald Wachmann
- ams AG, Tobelbader Strasse 30, 8141 Unterpremstaetten, Austria
- Jan Steffen Niehaus
- Center for Applied Nanotechnology CAN, Fraunhofer Institute for Applied Polymer Research IAP, Grindelallee 117, 20146 Hamburg, Germany
- Sören Becker
- Center for Applied Nanotechnology CAN, Fraunhofer Institute for Applied Polymer Research IAP, Grindelallee 117, 20146 Hamburg, Germany
- Öznur Tokmak
- Center for Applied Nanotechnology CAN, Fraunhofer Institute for Applied Polymer Research IAP, Grindelallee 117, 20146 Hamburg, Germany
- Hendrik Schlicke
- Center for Applied Nanotechnology CAN, Fraunhofer Institute for Applied Polymer Research IAP, Grindelallee 117, 20146 Hamburg, Germany
- Alexander Blümel
- Joanneum Research, Institute for Surface Technologies and Photonics, Franz-PichlerStrasse 30, 8160 Weiz, Austria
- Karl Popovic
- Joanneum Research, Institute for Surface Technologies and Photonics, Franz-PichlerStrasse 30, 8160 Weiz, Austria
- Martin Tscherner
- Joanneum Research, Institute for Surface Technologies and Photonics, Franz-PichlerStrasse 30, 8160 Weiz, Austria
- DOI
- https://doi.org/10.3390/proceedings2019014005
- Journal volume & issue
-
Vol. 14,
no. 1
p. 5
Abstract
A worldwide unique CMOS based chemical sensor device comprising an array of 8 microhotplates (µhps) for a total of 16 chemical sensors has been fabricated (Figure 1). [...]
Keywords
