Tuning of Reciprocal Plasmonic Metasurface Resonances by Ultra-Thin Conformal Coatings

Abstract

Metamaterials, in the form of perfect absorbers, have recently received attention for sensing and light-harvesting applications. The fabrication of such metamaterials involves several process steps and can often lead to nonidealities, which limit the performance of the metamaterial. A novel reciprocal plasmonic metasurface geometry composed of two plasmonic metasurfaces separated by a dielectric spacer was developed and investigated here. This geometry avoids many common fabrication-induced nonidealities by design and is synthesized by a combination of two-photon polymerization and electron-beam-based metallization. Infrared reflection measurements revealed that the reciprocal plasmonic metasurface is very sensitive to ultra-thin, conformal dielectric coatings. This is shown here by using Al2O3 grown by atomic layer deposition. It was observed experimentally that incremental conformal coatings of amorphous Al2O3 result in a spectral red shift of the absorption band of the reciprocal plasmonic metasurface. The experimental observations were corroborated by finite element model calculations, which also demonstrated a strong sensitivity of the reciprocal plasmonic metasurface geometry to conformal dielectric coatings. These coatings therefore offer the possibility for post-fabrication tuning of the reciprocal plasmonic metasurface resonances, thus rendering this novel geometry as an ideal candidate for narrow-band absorbers, which allow for cost-effective fabrication and tuning.

Keywords

• metamaterial
• nanofabrication
• atomic layer deposition
• tunable
• infrared
• perfect absorption