Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method

• Hao Hong,
• Jiangtao Wei,
• Xin Lei,
• Haiyun Chen,
• Pasqualina M. Sarro,
• Guoqi Zhang,
• Zewen Liu

Affiliations

Hao Hong

Department of Microelectronics, Delft University of Technology

Jiangtao Wei

School of Integrated Circuits, Tsinghua University

Xin Lei

School of Chemistry, Beihang University

Haiyun Chen

School of Electronic and Information Engineering, Beijing Jiaotong University

Pasqualina M. Sarro

Department of Microelectronics, Delft University of Technology

Guoqi Zhang

Department of Microelectronics, Delft University of Technology

Zewen Liu

School of Integrated Circuits, Tsinghua University