A Review of Vacuum-ARC Multilayer Coatings with High-Strength Characteristics and Adhesive Properties

Abstract

Using the TiSiN/MeN (Me = Cr, Nb, W, Mo, TiZr) coatings system as an example, the analyzed results of multilayer coatings with nanolayers of various functional purposes require a systematic approach to understanding the role of selected materials, growth conditions, microstructure, and required properties. Nanoscale grain boundaries, coherent interlayer boundaries, and changes in columnar morphology at the micro level significantly change the physical and mechanical properties of coatings. For all coatings, an increase in mechanical parameters (hardness, modulus of elasticity) is observed due to the formation of a nanoscale phase (which additionally prevents the movement of dislocations together with nanocomposite TiSiN). In addition, there is a mismatch of crystal lattices between layers. Effectively contributes to strengthening due to variable fields of stresses and strains caused by deformations of elastic coherence. Research has determined optimal conditions for the formation of coatings in a wide range of gas (nitrogen) pressure and shear potential, which also allowed for establishing the factors of structural changes and operational characteristics that will be optimal for their industrial use.

Keywords

• Cathodic vacuum arc physical vapor deposition
• Multilayer coatings
• TiSiN
• Bias potential
• Hardness
• Phase state